Microelectronic Processing Technology

Subject: 
Electrical & Computer Engineering (ECE)
Catalog number: 
631
Unit weight: 
0.50
Meet type: 
LEC
Grading basis: 
NUM
Cross-listing(s): 
N/A
Requisites: 
N/A
Description: 
Sources and purification of materials, crystal structure, diffusion, oxidation, ion implantation, alloying expitaxy, impurity profiling methods, metallisation, photo lithography. Technologies for VLSI.
Topic titles: 
N/A
Faculty: 
Engineering (ENG)
Academic level: 
GRD
Course ID: 
000783