Subject:
Electrical & Computer Engineering (ECE)
Catalog number:
631
Unit weight:
0.50
Meet type:
LEC
Cross-listing(s):
N/A
Requisites:
N/A
Description:
Sources and purification of materials, crystal structure, diffusion, oxidation, ion implantation, alloying expitaxy, impurity profiling methods, metallisation, photo lithography. Technologies for VLSI.
Topic titles:
N/A
Faculty:
Engineering (ENG)
Academic level:
GRD
Course ID:
000783
