Course subject: Nanotechnology (NANO)

Introduction to structure of nanoscale materials (crystal, surface and electronic) from an interdisciplinary perspective. Fundamentals introduced and used to discuss the design and fabrication of electronic devices, more complex surfaces/interfaces and case studies. Covers electronic structure of nanoscale materials, including metals, insulators, semiconductors and conductive polymers, and methodologies and approaches to their spectroscopic study. Interaction of electro-magnetic radiation and quantum-mechanical particles and matter. Methodologies include optical, x-ray and electron spectroscopic/spectro-microscopic methods, including epifluorescence, confocal scanning microscopy, near-field scanning optical microscopy, scanning transmission x-ray microscopy and electron energy loss spectroscopy.

Demonstrates how an understanding of atomic-scale interactions can be used to predict the behaviour of matter. Intro to important atomic forces in matter and the concepts of interatomic potentials. Concepts of normal modes, phonons and the quantization of energy in matter covered and related to experimental techniques such as IR and Raman spectroscopy. Examine fundamental thermodynamic quantities of matter, such as specific heat capacity, with emphasis on nanoscale materials. Molecular dynamics techniques, including force calculation methods, boundary conditions, measurements and error checks.

Course builds critical understanding in microfabrication, MEMS actuation and sensing mechanisms. Microelectromechanical systems and devices, including microactuators, microsensors, micro-domain forces, microfabrication and their actuation principles. Application domains of MEMS in RF, optics and biosensing. Specific topics include MEMS actuation mechanisms such as electrostatic, electromagnetic, thermal and piezoelectric, and sensing mechanisms such as piezoresistive, capacitive, optical and bio-transducer. Lithography, thinfilm deposition methods and etching techniques will be taught. Course covers practical examples, device architecture, fabrication design rules and fabrication procedures.