Advanced MicroElectroMechanical Systems: Principles, Design & Fabrication

This course provides specific knowledge in microelectromechanical systems (MEMS) and devices including microactuators, microsensors, micro-domain forces, microfabrication, and their actuation principles. Application domains of MEMS in RF, optics, and biosensing will be discussed. Specific topics include MEMS actuation mechanisms such as electrostatic, electromagnetic, thermal, and piezoelectric; and sensing mechanisms such a peizoresistive, capacitve, optical, and bio-transducer. Topics such as lithography, thin-film deposition methods, etching techniques will be taught. The course covers practical examples, device architecture, fabrication design rules and fabrication procedures.