Modeling, Simulation and Design of MEMS and NEMS

This course involves the rigorous grounding in the theory and practice of MEMS design as well as ways of extending MEMS (micro-electro-mechanical systems) to apply to the design of NEMS (nano-electro-mechanical systems). Modeling and simulation processes as they apply to MEMS and NEMS are presented. Concepts covered include basics of statics and dynamics necessary to construct lumped-mass models, an introduction to the use of reduced-order models in MEMS/NEMS design, the use of these modeling techniques with the use of commercial FEM software (COMSOL, ANSYS, and Coventor) in the simulation and design of MEMS/NEMS, and discussing the most effective uses and limitations of each of these approaches. The course involves building effective MEMS by design not by trial and error. Analytical tools for exploring the possibilities of nano-electro-mechanical systems (NEMS) are introduced.