The program information below was valid for the fall 2021 term (September 1, 2021 - December 31, 2021). This is the archived version; the most up-to-date program information is available through the current Graduate Studies Academic Calendar.

The Graduate Studies Academic Calendar is updated 3 times per year, at the start of each academic term (January 1, May 1, September 1). Graduate Studies Academic Calendars from previous terms can be found in the archives.

Students are responsible for reviewing the general information and regulations section of the Graduate Studies Academic Calendar.

  • Admit term(s) 
    • Fall
    • Winter
    • Spring
  • Delivery mode 
    • On-campus
  • Program type 
    • Collaborative
    • Master's
    • Research
  • Registration option(s) 
    • Full-time
    • Part-time
  • Study option(s) 
  • Minimum requirements 
    • An Honours Bachelor's degree (or equivalent) in Science with at least a 75% standing.
  • Application materials 
    • Graduate Record Examination (GRE) Physics subject test scores for all students who have completed their post-secondary education outside of Canada.
    • Supplementary information form
    • Transcript(s)
  • References 
    • Number of references:  3
    • Type of references: 

      2 of which are normally from academic sources

  • English language proficiency (ELP) (if applicable)

    Thesis option:

  • Graduate Academic Integrity Module (Graduate AIM)
  • Courses 
    • Students must complete 4 one-term courses (0.50 unit weight) including NANO 600 Introduction to Nanotechnology, 1 nanotechnology core course, 1 elective course from the list of technical electives and 1 of PHYS 701, PHYS 704 or PHYS 706.
    • Nanotechnology core courses:
      • NANO 601 Characterization of Nanomaterials
      • NANO 602 Structure and Spectroscopy of Nanoscale Materials
      • NANO 603 Nanocomposites
      • NANO 604 Nanomechanics and Molecular Dynamics Simulations
      • NANO 605/SYDE 683 Design of MEMS & NEMS
      • NANO 606/SYDE 682 Advanced MicroElectroMechanical Systems: Physics, Design & Fabrication
    • Core courses are designed to provide the base knowledge and skill set required to prepare students for more specialized courses and to conduct interdisciplinary nanoscale research.
    • Students who have completed their Bachelor of Applied Science (BASc) degree in Nanotechnology Engineering at the University of Waterloo can not take NANO 600. Instead, they can choose any 1 course from the list of nanotechnology core courses.
    • An average of at least 70% must be obtained in the required courses. A minimum grade of 65% is required for a pass in each course. If a student does not meet these minimum grade requirements, or receives a failing grade in any course, the student may be required to withdraw from the program.
    • Technical elective courses:
      • (a) Micro/nano Instruments and Devices
        • BIOL 642 Current topics in Biotechnology
        • CHEM 720 Topic 13 Selected Topics in Analytical Chemistry: Biosensors and Nanotechnology
        • CHEM 750 Topic 17 Selected Topics in Physical Chemistry: Surface Science and Nanotechnology
        • CHEM 750 Topic 23 Selected Topics in Physical Chemistry: Processes at Micro-Nano Scales
        • CHEM 750 Topic 27 Selected Topics in Physical Chemistry: Nanotechniques
        • ME 738 Special Topics in Materials: Materials for Nano and MEMS
        • ME 760 Special Topics in Thermal Engineering
        • ME 780 Special Topics in Mechatronics
      • (b) Nanoelectronics Design and Fabrication
        • CHE 620 Applied Engineering Mathematics
        • CHEM 750 Topic 11 Selected Topics in Physical Chemistry: Bioelectronics
        • CHEM 750 Topic 19 Selected Topics in Physical Chemistry: Carbon Nanotube Electronics
        • ECE 630 Physics and Models of Semiconductor Devices
        • ECE 631 Microelectronic Processing Technology
        • ECE 632 Photovoltaic Energy Conversion
        • ECE 633 Nanoelectronics
        • ECE 634 Organic Electronics
        • ECE 635 Fabrication in the Nanoscale: Principles, Technology, & Applications
        • ECE 636 Advanced Analog Integrated Circuits
        • ECE 637 Digital Integrated Circuits
        • ECE 639 Characteristics & Applications of Amorphous Silicon
        • ECE 672 Optoelectronic Devices
        • ECE 676 Quantum Information Processing Devices
        • ECE 677 Quantum Electronics and Photonics
        • ECE 730 Topic 10 Special Topics in Solid State Devices: Advanced Technology for Semiconductor Processing
        • ECE 730 Topic 11 Special Topics in Solid State Devices: Physics and Modeling of Semiconductor Devices
        • ECE 730 Topic 19 Special Topics in Solid State Devices: Magnetism and Spintronics
        • ECE 730 Topic 26 Special Topics in Solid State Devices: MBE and Quantum Nano Devices
        • ECE 730 Topic 28 Special Topics in Solid State Devices: Physics of Nanoscale Devices
        • ECE 730 Topic 29 Special Topics in Solid State Devices: Computational Nanoelectronics
        • ECE 770 Topic 18 Special Topics in Antenna and Microwave Theory: Nanoelectronics for QIP
        • ECE 770 Topic 21 Special Topics in Antenna and Microwave Theory: Quantum Optics & Nanophotonics
        • PHYS 713 Molecular Physics
        • PHYS 731 Solid State Physics 1
        • PHYS 747 Optical Electronics
      • (c) Nano-biosystems
        • BIOL 608 Advanced Bacterial Genetics
        • BIOL 614 Applied Bioinformatics and Genomics
        • BIOL 629 Cell Growth and Differentiation
        • BIOL 642 Current Topics in Biotechnology
        • BIOL 678 Current topics in Neurophysiology
        • CHE 622 Statistics in Engineering
        • CHE 660 Principles of Biochemical Engineering
        • CHE 760 Special Topics in Biochemical Engineering
        • CHE 765 Research Topics in Biochemical Engineering
        • CHEM 737 Enzymes
        • ECE 730 Topic 25 Special Topics in Solid State Devices: Microfluidic & Nanobiotech Systems
        • PHYS 751 Clinical Applications of Physics in Medicine
        • PHYS 752 Molecular Biophysics
      • (d) Nanomaterials
        • CHE 610 Theory and Application of Transport Phenomena
        • CHE 612 Interfacial Phenomena
        • CHE 622 Statistics in Engineering
        • CHE 630 Chemical Reactor Analysis
        • CHE 640 Principles of Polymer Science
        • CHE 641 Physical Properties of Polymers (cross-listed with CHEM 771)
        • CHE 740 Special Topics in Polymer Science and Engineering
        • CHE 745 Research Topics in Polymer Science and Engineering
        • CHE 750 Special Topics in Materials Science: Thin Film Fabrications & Mechanical Properties
        • CHE 755 Research Topics in Electrochemical Engineering, Interfacial Engineering & Material Science
        • CHEM 710 Topic 17 Selected Topics in Inorganic Chemistry: Nanostructured Materials and Integrative Chemistry
        • CHEM 713 Chemistry of Inorganic Solid State Materials
        • CHEM 720 Topic 14 Selected Topics in Analytical Chemistry: Nanomaterials for Energy Conversion and Clean Environment
        • CHEM 750 Topic 17 Selected Topics in Physical Chemistry: Surface Science and Nanotechnology
        • CHEM 770 Principles of Polymer Science
        • CHEM 773 Topic 11 Selected Topics in Polymer Chemistry: Synthesis, Self-assembly and Materials Application of Inorganic Polymers
        • CHEM 773 Topic 14 Selected Topics in Polymer Chemistry: Living Polymerization Techniques
        • ME 632 Experimental Methods in Materials Engineering
        • ME 738 Special Topics in Materials: Materials for Nano and MEMS
        • PHYS 701 Quantum Mechanics 1
        • PHYS 704 Statistical Physics 1
        • PHYS 706 Electromagnetic Theory
        • PHYS 773 Special Topics in Physics
  • Link(s) to courses
  • Academic Integrity Workshop
    • This is a milestone requirement for all full-time students. Part-time students are not required to complete this workshop. This is a mandatory workshop on academic integrity and intellectual property which will be offered to all new incoming graduate students within the Faculty of Science during the first term of each Fall and Winter.
    • Note: students will be required to complete both the Academic Integrity Module as a required course along with the Academic Integrity Workshop milestone. The Module will appear on the student's transcript as a course. The Workshop will appear on the student's transcript as a milestone.
  • Nanotechnology Seminar
    • This seminar is a forum for student presentation of research results or proposals. Invited speakers from academia and industry will also present results of research from time to time. The range of topics that will be addressed in the seminar crosses all areas of research in the collaborative program. Each student is required to present at least 1 research seminar. To receive credit, students are required to attend at least 8 seminars other than their own before completing their program.
    • The seminar is graded on a Credit/Non-Credit basis.
  • Master’s Thesis
    • Students must complete a thesis based on original research. The subject of research must be approved by the candidate's supervisor.
    • Acceptance of the thesis requires the approval by an Examining Committee following an oral defence of the thesis.
  • Other requirements 
    • Advisory Committee meetings: it is required that the student meet formally with their Advisory Committee within the first six months of registration and subsequently at least once per year. If the student receives more than oneunsatisfactory evaluation from an advisory committee meeting, they may be required to withdraw from the program.
    • The MSc Advisory Committee must consist of at least three members, including:
      • The student’s supervisor(s); the primary supervisor acts as the Committee Chair.
      • At least one Committee member that is a regular faculty member of the Department of Physics and Astronomy at the University of Waterloo. Note: This requirement does not apply for MSc students who are supervised by a Perimeter Institute faculty member with ADDS status.
      • At least two Committee members that are regular, adjunct, or cross-listed faculty members of the Department of Physics and Astronomy at the University of Waterloo or the Department of Physics at the University of Guelph.
    • The MSc Defence Committee must consist of a minimum of three voting faculty members, including:
      • The supervisor(s).
      • Two other faculty members, of which one must be a regular faculty member of the Department of Physics and Astronomy at the University of Waterloo.